Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority claimed from JP2007-227340 external-priority Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd Assigned to NIHON DEMPA KOGYO CO., LTD.
Original Assignee Nihon Dempa Kogyo Co Ltd Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Takehiro Takahashi Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Fee Related Application number US12/199,719 Other versions US20090058232A1
PIEZOELECTRIC TUNING FORK PDF
Google Patents Methods for manufacturing tuning-fork type piezoelectric vibrating devicesĭownload PDF Info Publication number US7770275B2 US7770275B2 US12/199,719 US19971908A US7770275B2 US 7770275 B2 US7770275 B2 US 7770275B2 US 19971908 A US19971908 A US 19971908A US 7770275 B2 US7770275 B2 US 7770275B2 Authority US United States Prior art keywords metal layer layer tuning photoresist metal Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US7770275B2 - Methods for manufacturing tuning-fork type piezoelectric vibrating devices We demonstrated that the QTF geometry can be properly designed to enhance the signal from a specific readout mode.US7770275B2 - Methods for manufacturing tuning-fork type piezoelectric vibrating devices Comparison between the interferometric and piezoelectric readouts were performed by using both QTFs in a QEPAS sensor setup for water vapor detection. To compare interferometric and piezoelectric readouts, two QTFs have been selected a tuning fork with rectangular-shape of the prongs, having a resonance frequency of 3.4 kHz and a quality-factor of 4,000, and a QTF with prong having a T-shape characterized by a resonance frequency of 12.4 kHz with a quality-factor of 15,000. A theoretical model relating the prong vibration amplitude with the QTF prong sizes and electrical resistance is proposed. We demonstrated that the QTF geometry can be properly designed to enhance the signal from a specific readout mode.ĪB - We report on a comparison between piezoelectric and interferometric readouts of vibrations in quartz tuning forks (QTFs) when acting as sound wave transducers in a quartz-enhanced photoacoustic setup (QEPAS) for trace gas detection. N2 - We report on a comparison between piezoelectric and interferometric readouts of vibrations in quartz tuning forks (QTFs) when acting as sound wave transducers in a quartz-enhanced photoacoustic setup (QEPAS) for trace gas detection. T2 - A comparison between piezoelectric and interferometric readout in custom quartz tuning forks T1 - Photoacoustic spectroscopy for gas sensing
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